High-speed optical networks enable people around the world to communicate and share ideas instantly. The tiny MEMS optical switches play an important role in these large number of fiber optic systems. This type of switch involves three fields of mechanical, optical, and electrical and is therefore suitable as a device for learning MEMS design and simulation using the Tanner EDA tool.
Introduction
High-speed optical networks enable people around the world to communicate and share ideas instantly. The tiny MEMS optical switches play an important role in these large number of fiber optic systems. This type of switch involves three fields of mechanical, optical, and electrical and is therefore suitable as a device for learning MEMS design and simulation using the Tanner EDA tool. As shown in Figure 1, this article describes the creation and simulation of a 2 x 2 optical switch schematic.
Figure 1: 2 x 2 Optical Switch (Source: MEMS Optical Switch Profile, M. Tung)
There are several ways to create a light switch. The optical switch studied in this paper employs a double-sided mirror whose motion is controlled by a comb-like electrostatic actuator. The actuator movement is controlled by a set of folding springs. The mirror slides out to the intersection of the two vertical alignment slots and then retracts when driven. There are two pairs of fiber optic transmitters and receivers in the alignment slot (only one transmitter is shown in Figure 1).
In the cross state, the comb drive is not activated and the mirror is at the slot intersection. The mirror reflects the light beam from input 1 to output 2 and the light beam from input 2 to output 1 .
In the straight-through state, the comb drive is activated and the mirror is retracted. The beam from input 1 is received by output 1 and input 2 emits the beam to output 2 .
We use optical micromachining to fabricate optical switches on wafers. The pattern of mirrors, fiber alignment grooves, comb drive actuators and folding springs are first drawn on the mask. The alignment grooves are etched through the etching process, releasing the movable structure and leaving anchor points for the mechanical components. The final manufacturing step is to place fiber optic transmitters and receivers and then coat the mirrors with aluminum.
Schematic creation
The process of creating an optical switch begins with constructing a S-Edit schematic. This editor provides a rich library of components that can be used to quickly assemble switches. The first step is to call each optical component instance (Figure 2) from the library and then connect it.
Figure 2: Optical components of the switch
The designer can call the parameterized components from the S-Edit library instance and connect them:
• Dual-lens fiber transmitter: Each lens is a single-mode component that outputs a Gaussian beam. The end face of the transmitter is curved and can be used as a lens for focusing the beam.
• Dual lens fiber receiver: Collects Gaussian beams and generates coupled power.
• Two optical power sources: power the fiber transmitter.
• A double-sided plane mirror: defines the reflection characteristics of a Gaussian beam.
Figure 3 shows a powered transmitter and receiver pair connected to a mirror.
Figure 3: Circuit diagram of optical components
In order to meet the optical requirements, the parameters of the various components can be changed. For example, a designer can define the size and thickness of a mirror, or define the waist (shape) of a Gaussian beam.
The next step is to define the motion of the mirror, as shown in Figure 4.
Figure 4: Mechanical movement of the mirror
To make the mirror move, the designer can invoke a set of parameterized mechanical components from the S-Edit library instance and connect them:
• A linear comb drive: Defines the electrostatic capacitance plate of the drive. One metal plate is anchored on the base plate and the other metal plate moves along the comb teeth.
• Two folding springs: Each spring defines a folded cantilever beam with one leg anchored and the other leg free to move.
• A rigid metal plate: provides infinite stiffness in each direction, transmitting force and momentum without deformation.
There is also a need for a signal source to provide electrical pulses that activate the comb drive. Figure 5 shows an energized linear comb drive connected to two folding springs. The stationary metal plate of the comb drive, the anchor legs of each folding spring, and the mirror are connected to the rigid metal plate.
Figure 5: Circuit diagram of mechanical components
In order to meet the mechanical requirements, the parameters of various components can be changed. For example, the designer can define the length and width of the folding spring, or specify the number of comb drive teeth.
The mechanical coupling to the mirror is achieved by the example of a voltage-controlled voltage source (VCVS) component that is controlled by a Gaussian beam and connected to a rigid metal plate, as shown in FIG.
Figure 6: Mechanical Components Connected to the Mirror
Schematic verification
The next step is to use T-Spice to simulate the schematic and then use a waveform viewer to analyze the design to determine if the optical switch is as expected. Figure 7 shows the transient simulation results.
Figure 7: Verification of design through waveform analysis
The upper waveform shows the pass-through and cross-state values ​​based on the mirror motion and the relative displacement of the comb drive. The waveform below shows the power of the fiber receiver based on these states.
Conclusion
Optical switches are one of the most basic MEMS devices used in the component toolbox of an assembly system. The Tanner design process allows designers to quickly expand the toolbox to create an almost limitless variety of stunning systems.
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